[2024 OPEN ACCESS]
Formation of GaN mesas with reverse-tapered edge structures on a lattice-matched AlInN layer for a positive beveled edge termination
2024 Appl. Phys. Express 17 086501
iopscience.iop.org/article/10.3...
#APEX
#Physics
#Openaccess
#GaN
#AlInN
#crystallographic
#etching
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