Explore how Nurten Koc’s award-winning silicon metalens was made with the DWL 66⁺ Laser Lithography System: 250 nm gaps, high aspect ratios, low-temp patterning, and scalable fabrication for mid-IR flat optics.
👉 heidelberg-instruments.com/wp-content/u...
#FlatOptics #Metalens #Nanofabrication
1
0
0
0