[2023 Open Access]
Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer
2023 Jpn. J. Appl. Phys. 62 SC1015

iopscience.iop.org/article/10.3...

#JJAP
#physics
#Openaccess
#TMDC
#ZrS2
#PVD
#SVA
#XPS
#Interface
#dipole
#Sputtering