[2023 Open Access]
Fabrication of high-aspect-ratio SiO2 nanopillars by Si thermal oxidation for metalenses in the visible region
2023 Jpn. J. Appl. Phys. 62 SG1034

iopscience.iop.org/article/10.3...

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#physics
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#nanopillar
#thermal
#oxidation
#metalens
#metasurface
#optics