Tabletop extreme ultraviolet test platform for optical property evaluation of lithography materials Extreme ultraviolet (EUV) lithography, owing to its ultrashort wavelength and high photon energy, serves as a key technology in advanced semiconductor manufactu

In #JVSTB, researchers present a tabletop EUV test platform designed for lab-scale evaluation of lithography materials to reduce reliance on large, costly facilities while still enabling reliable measurements

doi.org/10.1116/6.00...

Featured on our most recent #JVSTB cover, researchers from AIST in Japan highlight the critical importance of interparticle contact in optimizing all-solid-state battery performance, offering valuable insights for improving battery design.🔋
doi.org/10.1116/6.00...

Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring Reactive ion etching and reactive ion beam etching are widely used processes in the semiconductor industry but face challenges due to their high cost, energy de

Featured on the latest #JVSTB cover, authors from @czechacademy.bsky.social & Brno University of Technology developed a custom-designed compact vacuum chamber for laser induced plasma etching. doi.org/10.1116/6.00...

Abstract Submission

This work is being presented at #AVS71 - and you can still submit your abstract until August 18th! Authors presenting at AVS71 are invited to submit to #JVSTA or #JVSTB.

Submit your abstract today!
avs71.avs.org/abstract-sub...

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Covering nanoscience & technology of vacuum electron sources & their applications, #JVSTB publishes a collection on Vacuum Nanoelectronics each year. Read the recent collection FREE for a limited time & submit to this year's now!

📑 Read: tinyurl.com/2vm6xnec

✏️ Submit: tinyurl.com/yntp2p5h

Vacuum Nanoelectronics - AIP Publishing LLC

#JVSTB has published collections on Vacuum Nanoelectronics for many years - contribute to our new collection now! Covering topics on the science, technology, & applications of vacuum electron sources.

Submit until October 15, 2025!

tinyurl.com/yntp2p5h

Smart Sensors and Devices for Healthcare - AIP Publishing LLC

Our new #JVSTB collection covers the latest advances in sensor technologies & medical devices that leverage vacuum, nanotechnology, & advanced fabrication techniques - submit to the collection on Smart Sensors & Devices for Healthcare by October 15, 2025!
tinyurl.com/3czpycey

Read Recent Collection on CHIPS: Future of Semiconductor Processing and Devices Email from AVS Read Recent Collection on CHIPS: Future of Semiconductor Processing and Devices Read the Collection for FREE for a Limited Time! Future of plasma etching for microelectronics: Challenge

AVS has lots to offer the #semiconductor industry, including high-impact research related to the #CHIPSAct. Check our our recent collection in #JVSTB on related research - FREE for a limited time! @avs-members.bsky.social

tinyurl.com/4kwnebmy

Read Recent Collection Honoring John Ekerdt’s Contributions to Chemical Reaction Engineering and Surface Chemistry for Electronic Materials Email from AVS   Read Recent Collection Honoring John Ekerdt’s Contributions to Chemical Reaction Engineering and Surface Chemistry for Electronic Materials Read the Full Collection for FREE for a Lim

A long-time contributor to #JVSTA & #JVSTB, this collection celebrates the important contributions of John Ekerdt to the area of surface & reaction chemistry of electronic & optoelectronic materials. Read the entire collection FREE for a limited time!
tinyurl.com/mpe77skk

This article from our collection of papers from the 67th #EIPBN 2024 was featured on the latest cover of #JVSTB!

Read the paper here: doi.org/10.1116/6.00...

Check out the entire collection below and stay tuned for papers from this year's meeting!

tinyurl.com/mr3saj4e

Smart Sensors and Devices for Healthcare - AIP Publishing LLC

This new #JVSTB collection on Smart Sensors & Devices for Healthcare highlights research integrating materials science, nanotechnology, & biomedical engineering to develop next-gen healthcare technologies. Submit by Oct. 15, 2025! ⚕️

tinyurl.com/3czpycey

Extended model for chemically amplified resist with multiple photoacid generators The chemically amplified resist, which contains photoacid generator (PAG), has been widely used in high-volume integrated circuit manufacturing. Conventional re

As #semiconductor technology advances, high-performance photoresists are needed for precise chip manufacturing. This multi-PAG model accurately simulates these complex reactions in modern resists, improving lithography precision and optimization. #JVSTB

doi.org/10.1116/6.00...

Today we congratulate Stefan Zollner, #JVSTB Most Valuable Reviewer for 2024! Stefan has been a consistent & reliable reviewer for many years & has published with us often. You can read some of his work at the link below.

Thank you, Stefan!

#peerreview
tinyurl.com/5f5d7nj8

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for rapid (<40 ms response time) and sensitive (in the range o

Microfabricated nanocalorimeters prove to be effective for monitoring plasma-generated radicals, widely used in #semiconductor fabrication. Researchers from NIST and @univofmaryland.bsky.social report rapid response times and high sensitivity. #JVSTB @avs-members.bsky.social
doi.org/10.1116/6.00...

Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C Cycle etching of GaN with high etching rate controllability was achieved by cycle exposure to BCl3 gas and F2-added Ar plasma at an ion energy of 23 eV and a su

Researchers in Japan have developed a cycle etching method for GaN to fabricate #metaloxide #semiconductor HEMTs. By alternating exposure to BCl3 gas and F2-added Ar #plasma, they achieved precise etching control with minimal damage. #JVSTB @avs-members.bsky.social
doi.org/10.1116/5.02...

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering We have developed a novel approach for the fabrication of 6G communication antenna substrates by directly sputtering a copper seed layer onto a resin with low d

Researchers in Japan are tackling the challenge of transmission loss in antenna substrates used for next-gen #6G communication systems by eliminating the need for metal adhesion layers like titanium, using novel surface treatments. #JVSTB @avs-members.bsky.social
doi.org/10.1116/6.00...

Machine learning driven measurement of high-aspect-ratio nanostructures using Mueller matrix spectroscopic ellipsometry Accurate fabrication of high-aspect ratio (HAR) structures in applications from semiconductor devices to x-ray observatories is essential for their optimal perf

Using Mueller Matrix Spectroscopic #Ellipsometry, a new #machinelearning based method is speeding up the measurement of high-aspect-ratio (HAR) structures in #microelectronics & #photonics - vital for devices like MEMS, #semiconductors, & #solarcells. #JVSTB
doi.org/10.1116/6.00...

Endoscope-assisted manipulator for precooling and deposition in low-temperature scanning tunneling microscope systems We present the design and implementation of an advanced manipulator system for use in low-temperature scanning tunneling microscope (STM) setups, specifically i

In this #JVSTB study, an endoscope-assisted manipulator for low-temperature STM systems is designed for precise sample handling, precooling, & deposition. It enhances alignment, reduces thermal shock, & prevents contamination. #microscopy @avs-members.bsky.social doi.org/10.1116/6.00...

Optical metasurface fabricated using 3D nanoimprint lithography To improve the performance of the next-generation optical metasurface device, we investigated the feasibility of practical design and fabrication processes for

Researchers from @usc.edu developed a 3D nanoimprint lithography technique to create multilayer metasurfaces, boosting the performance of next-gen optical metasurface devices for fields like #LiDAR, #QuantumSensing, & particle control #JVSTB #EIPBN doi.org/10.1116/6.00...

Measurement of field emission array current distributions by metal-coated CMOS image sensors A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission ar

Researchers from OTH Regensburg and Ketek GmbH have developed a method for measuring current distributions across field emission arrays using a Cu-coated #CMOS image sensor, allowing for high-res mapping of emission currents without damaging the sensor surface. doi.org/10.1116/6.00... #JVSTB

In this #JVSTB paper, the authors use #machinelearning to predict the exposure and development curves of chemically amplified photoresists using different resins, demonstrating the power of ML to enable & enhance technological developments. doi.org/10.1116/6.00... @avs-members.bsky.social

Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence The need for reliable quantum light sources drives our research to study color centers (CCs) in silicon as telecommunication O-band emitters. Building from phot

In this #JVSTB Editor's Pick, researchers from @univofmaryland.bsky.social, #NIST, and #UMBC fabricated silicon W- and G- center embedded LEDs to address the need for reliable quantum light sources. doi.org/10.1116/6.00...

Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays Large area addressable zinc oxide (ZnO) nanowire field emitter arrays (FEAs) have important applications in vacuum microelectronic devices such as flat panel x-

Check out this paper in our #JVSTB collection on Vacuum Nanoelectronics: Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays doi.org/10.1116/6.00...

Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning Cellular processes in brain tissue such as migration, proliferation, morphology, and differentiation are influenced by mechanical cues, demonstrating the interp

#JVSTB Editor Pick: Stacked hydrogel-based Brain-on-Chips utilizing capillary force flow pinning doi.org/10.1116/6.00...

Nanofabrication of high transition temperature superconductive electronics with focused helium ion irradiation Superconductive electronics from Josephson junctions are governed by quantum mechanical tunneling through sub-10 nm scale insulating tunnel barriers. The electr

UC Riverside researchers focus a helium ion beam to less than one nanometer to convert material from superconductor to insulator for direct patterning of nanoscale energy-efficient quantum circuits. #JVSTB doi.org/10.1116/6.00...

Read Papers from the Recent Collection on Multifunctional Coatings and Surfaces #JVSTB conta.cc/40qm8b8

Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning Three-dimensional (3D) stacking of nano-devices is an effective method for increasing areal density, especially as downscaling of lateral device dimensions beco

#JVSTB Featured Article: Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nano-patterning doi.org/10.1116/6.00...

Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores In this manuscript, we report the facile fabrication of large-area model membranes with highly uniform and high aspect ratio pores with diameters <20 nm. The

#JVSTB Editor Pick: Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores doi.org/10.1116/6.00...

Fabrication of Double-Grooved Gratings using Coplanar Multi-Beam Holographic Lithography with a Phase Mask #JVSTB doi.org/10.1116/6.00...

Design, modeling, and fabrication of high frequency Oersted lines for electron spin manipulation in silicon based quantum devices Coherent manipulation of electron spins is one of the central challenges of silicon-based quantum computing efforts. Electron spin resonance (ESR) lines, or Oer

Characterizing electromagnetic field strength surrounding a nanometer terminated ESR line using a coupled receiving antenna, fabricated for atomic scale single dopant qubit manipulation. #JVSTB doi.org/10.1116/6.00...