[Spotlights 2023]
Investigation of high speed β-Ga2O3 growth by solid-source trihalide vapor phase epitaxy
2023 Jpn. J. Appl. Phys. 62 SF1021
iopscience.iop.org/article/10.3...
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#physics
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#Crystal
#Ga2O3
#Solid
#source
#HVPE
#THVPE
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