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This #JAP2005 is "part of the #ALDep review series" posted before, cited >2000 times. doi.org/10.1063/1.19... 🧪

Here e.g. #VPHA #ALDep history work foundations were laid and those of #AtomicLimits #ALDdatabase periodic table; #TMAwater surface chemistry studies mapped; term GPC justified, & more.

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Another review not yet mentioned in BlueSky, to be corrected :)

This #ALDep crystallinity review by Miikkulainen et al. (2013) e.g. forms the core of the #AtomicLimits #ALDdatabase.

It also contains tables from which ALD processing windows can be inferred.

#ALDep 🧪
doi.org/10.1063/1.47...