[Spotlights 2023]
Mass spectrometric study of β-Ga2O3 growth process by metalorganic vapor phase epitaxy
2023 Jpn. J. Appl. Phys. 62 SF1019

iopscience.iop.org/article/10.3...

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#physics
#Spotlights
#Ga2O3
#MOVPE
#Triethylgallium
#mass
#spectrometry